JPH01167067U - - Google Patents

Info

Publication number
JPH01167067U
JPH01167067U JP6426188U JP6426188U JPH01167067U JP H01167067 U JPH01167067 U JP H01167067U JP 6426188 U JP6426188 U JP 6426188U JP 6426188 U JP6426188 U JP 6426188U JP H01167067 U JPH01167067 U JP H01167067U
Authority
JP
Japan
Prior art keywords
laser
gas
discharge
gas flow
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6426188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6426188U priority Critical patent/JPH01167067U/ja
Publication of JPH01167067U publication Critical patent/JPH01167067U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP6426188U 1988-05-16 1988-05-16 Pending JPH01167067U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6426188U JPH01167067U (en]) 1988-05-16 1988-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6426188U JPH01167067U (en]) 1988-05-16 1988-05-16

Publications (1)

Publication Number Publication Date
JPH01167067U true JPH01167067U (en]) 1989-11-22

Family

ID=31289735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6426188U Pending JPH01167067U (en]) 1988-05-16 1988-05-16

Country Status (1)

Country Link
JP (1) JPH01167067U (en])

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